1. A Quantified Dosing ALD Reactor with In-situ Diagnostics for Surface Chemistry Studies Open Access Author: Larrabee, Thomas James Title: A Quantified Dosing ALD Reactor with In-situ Diagnostics for Surface Chemistry Studies Graduate Program: Chemistry Keywords: atomic layer depositionquartz crystal microbalancequadrupole mass spectrometerin-situ diagnosticsadsorptionreactivity File: Download Larrabee_to_upload.pdf Committee Members: David Lawrence Allara, Dissertation Advisor/Co-AdvisorThomas E Mallouk, Dissertation Advisor/Co-AdvisorMiriam Arak Freedman, Committee MemberRoman Engel Herbert, Committee Member
