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Author:

Bansal, Anushka

Title:

METALORGANIC CHEMICAL VAPOR DEPOSITION OF 3D AND 2D GROUP-III NITRIDES

Graduate Program:

Materials Science and Engineering

Keywords:

chemical vapor deposition
group III nitrides
2D materials
gallium nitride
boron nitride
2-dimensional gallium nitride
thin film deposition
semiconductor thin films

File:

Download Bansal_dissertation_08242021.pdf

Committee Members:

Nasim Alem, Major Field Member
Sukwon Choi, Outside Unit & Field Member
Suzanne Mohney, Major Field Member
Joan Redwing, Chair & Dissertation Advisor
John Mauro, Program Head/Chair