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1. Optical and Electrical Characterization of High Resistivity Semiconductors for Constant-bias Microbolometer Devices

open_access
Open Access
Author:
St John, David Benjamin
Title:
Optical and Electrical Characterization of High Resistivity Semiconductors for Constant-bias Microbolometer Devices
Graduate Program:
Materials Science and Engineering
Keywords:
PECVD
silicon
germanium
infrared
ellipsometry
spectroscopic ellipsometry
infrared ellipsometry
microbolometer
File:
Download Dissertation_Final.pdf
Committee Members:
Thomas Nelson Jackson, Dissertation Advisor/Co-Advisor
Thomas Nelson Jackson, Committee Chair/Co-Chair
Mark William Horn, Committee Member
Noel Christopher Giebink, Committee Member
Jeffrey Brownson, Committee Member
Christopher Roman Wronski, Committee Member
Nikolas J Podraza, Special Member