1. Integration and Characterization of Silicon Nanowire Field Effect Devices Open Access Author: Wang, Yanfeng Title: Integration and Characterization of Silicon Nanowire Field Effect Devices Graduate Program: Electrical Engineering Keywords: thermal oxidationsilicon nanowirefield effect devicevapor-liquid-solid File: Download Thesis-YZW111.pdf Committee Members: Theresa Stellwag Mayer, Committee Chair/Co-ChairJoan Marie Redwing, Committee MemberJerzy Ruzyllo, Committee MemberSuzanne E Mohney, Committee MemberWilliam Kenneth Jenkins, Committee Member