Magnetic Resonance Observations of Defects Involved in Bias Temperature Instabilities and Stress Induced Leakage Currents in HfO2 and SiO2 Based Metal-Oxide-Silicon Structures
Patrick M Lenahan, Dissertation Advisor/Co-Advisor Patrick M Lenahan, Committee Chair/Co-Chair Suzanne E Mohney, Committee Member Jerzy Ruzyllo, Committee Member Suman Datta, Committee Member
Thomas Mallouk, Committee Member & Major Field Represnt Raymond Schaak, Committee Member & Major Field Represnt John Golbeck, Committee Member & Related Areas Repres Philip Bevilacqua, Program Head/Chair Benjamin Lear, Chair & Dissertation Advisor