1. damage-free patterning of ferroelectric lead zirconate titanate thin films for microelectromechanical systems via contact printing Open Access Author: Welsh, Aaron Joel Title: damage-free patterning of ferroelectric lead zirconate titanate thin films for microelectromechanical systems via contact printing Graduate Program: Materials Science and Engineering Keywords: soft lithographythin filmsdry etchingpiezoresponse force microscopyelectroceramicspiezoelectricsferroelectrics File: Download Aaron_J_Welsh_PhD_Thesis_Final.pdf Committee Members: Susan E Trolier Mckinstry, Dissertation Advisor/Co-AdvisorClive A Randall, Committee MemberMichael T Lanagan, Committee MemberMichael Anthony Hickner, Committee Member
