1. FREE CARBON STRUCTURE IN SILICON OXYCARBIDE THIN FILMS Open Access Author: Ryan, Joseph V Title: FREE CARBON STRUCTURE IN SILICON OXYCARBIDE THIN FILMS Graduate Program: Materials Science and Engineering Keywords: fluctuation electron microscopythin filmssputteringsilicon oxycarbidecarbon nanoparticlestribology File: Download Ryan_PhD_Thesis_-_FINAL_VERSION.pdf Committee Members: Carlo G Pantano, Committee Chair/Co-ChairElizabeth C Dickey, Committee MemberMark William Horn, Committee MemberPaul Voyles, Committee MemberPaolo Colombo, Committee MemberJoseph Patrick Stitt, Committee Member