1. defect structure and electronic transport in low-k films used for back end of line dielectrics Open Access Author: Pomorski, Thomas Anthony Title: defect structure and electronic transport in low-k films used for back end of line dielectrics Graduate Program: Materials Science and Engineering Keywords: electronic materialsEPRlow-kback end of line File: Download Pomorski_thesis_final_submission_edits.pdf Committee Members: Patrick M Lenahan, Thesis Advisor/Co-AdvisorS Ashok, Thesis Advisor/Co-AdvisorJerzy Ruzyllo, Thesis Advisor/Co-AdvisorSuzanne E Mohney, Thesis Advisor/Co-Advisor
