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Author:

Edge, Lisa Friedman

Title:

GROWTH OF AMORPHOUS AND EPITAXIAL ALTERNATIVE GATE DIELECTRICS ON SILICON BY MOLECULAR-BEAM EPITAXY AND THEIR CHARACTERIZATION

Graduate Program:

Materials Science and Engineering

Keywords:

high-K
molecular-beam epitaxy
LaAlO3
LaScO3
Sc2O3
La2O3
molecular-beam deposition
alternative gate dielectrics

File:

Download Thesis_Lisa_Edge.pdf

Committee Members:

Darrell G Schlom, Committee Chair/Co-Chair
Elizabeth C Dickey, Committee Member
Venkatraman Gopalan, Committee Member
Thomas Nelson Jackson, Committee Member