Search

Author:

Sun, Jie

Title:

PECVD, SPATIAL ALD, AND PEALD ZINC OXIDE THIN FILM TRANSISTORS

Graduate Program:

Electrical Engineering

Keywords:

Plasma Enhanced Atomic Layer Deposition
Atomic Layer Deposition
Plasma Enhanced Chemical Vapor Depostion
Thin Film Transistors (TFTs)
Zinc Oxide (ZnO)
ZnO TFTs Circuits

File:

Download Final0729.pdf

Committee Members:

Thomas Nelson Jackson, Committee Chair/Co-Chair
Jerzy Ruzyllo, Committee Member
Joan Marie Redwing, Committee Member
Mark William Horn, Committee Member