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Author:

Ozcelik, Adem

Title:

VANADIUM-TRANSITION METAL OXIDE ALLOY THIN FILMS FOR MICROBOLOMETER APPLICATIONS

Graduate Program:

Materials Science and Engineering

Keywords:

ALD
co-sputtering
sputtering
thin films
Vanadium oxide
microbolometer
Atomic Layer Deposition
VTIP
Alloying of vanadium oxide

File:

Download Adem_Ozcelik_MS_MATSE.pdf

Committee Members:

David Lawrence Allara, Thesis Advisor/Co-Advisor
David Lawrence Allara, Thesis Advisor/Co-Advisor