1. Magnetron sputtering of multicomponent refractory thin films Open Access Author: Borman, Trent Mitchell Title: Magnetron sputtering of multicomponent refractory thin films Graduate Program: Materials Science and Engineering Keywords: UHTCssputteringHiPIMSreactive sputteringrefractorythin filmsUHTCcarbidecarbides File: Download TrentBormanDissertation.pdf Committee Members: Jon-Paul Maria, Dissertation Advisor/Co-AdvisorJon-Paul Maria, Committee Chair/Co-ChairSusan B Sinnott, Committee MemberJoshua Alexander Robinson, Committee MemberBrian Foley, Outside MemberJohn C Mauro, Program Head/Chair
