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Author:

Mourey, Devin A

Title:

Plasma-Enhanced Atomic Layer Deposition ZnO For Multifunctional Thin Film Electronics

Graduate Program:

Materials Science and Engineering

Keywords:

Zinc Oxide
ZnO
ALD
PEALD
Thin Film Transistor
Thin Film Circuit

File:

Download D_A_Mourey_PhD_Thesis-Final_eTD.pdf

Committee Members:

Thomas Nelson Jackson, Dissertation Advisor/Co-Advisor
Thomas Nelson Jackson, Committee Chair/Co-Chair
Susan E Trolier Mckinstry, Committee Member
Joan Marie Redwing, Committee Member
Jerzy Ruzyllo, Committee Member