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Author:

Tipsawat, Pannawit

Title:

Released Piezoelectric Thin Films for Piezoelectric Micromachined Ultrasound Transducers (PMUT)

Graduate Program:

Materials Science and Engineering

Keywords:

Piezoelectric thin films
PMUT
MEMS
Effective longitudinal piezoelectric coefficient
PZT
Neurostimulation
Released piezoelectric thin films
Acoustic
Ultrasound

File:

Download Pannawit_Dissertation.pdf

Committee Members:

John Mauro, Program Head/Chair
Susan Trolier-McKinstry, Chair & Dissertation Advisor
Tom Jackson, Major Field Member
Sri-Rajasekhar Kothapalli, Outside Unit & Field Member
Andrea Arguelles, Major Field Member