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Start Over Year 2009 Keyword RF Keyword SiNx Keyword passivation

1. Surface Passivation Studies of AlGaN/GaN High Electron Mobility Transistors

open_access
Open Access
Author:
Meyer, David J.
Title:
Surface Passivation Studies of AlGaN/GaN High Electron Mobility Transistors
Graduate Program:
Materials Science and Engineering
Keywords:
passivation
plasma
silicon nitride
SiNx
pulsed I-V
current recovery
XPS
RF
File:
Download MeyerPhDThesis2008.pdf
Committee Members:
Professor Joseph R Flemish, Committee Chair/Co-Chair
Professor Joan M Redwing, Committee Chair/Co-Chair
Thomas Nelson Jackson, Committee Member
Suzanne E Mohney, Committee Member