Keyword: Plasma Enhanced Chemical Vapor Depostion

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Author:: Sun, Jie
Title:: PECVD, SPATIAL ALD, AND PEALD ZINC OXIDE THIN FILM TRANSISTORS
Graduate Program:: Electrical Engineering
Keywords:: Plasma Enhanced Atomic Layer Deposition
Atomic Layer Deposition
Plasma Enhanced Chemical Vapor Depostion
Thin Film Transistors (TFTs)
Zinc Oxide (ZnO)
ZnO TFTs Circuits
File:: Download Final0729.pdf
Committee Members:: Thomas Nelson Jackson, Committee Chair/Co-Chair
Jerzy Ruzyllo, Committee Member
Joan Marie Redwing, Committee Member
Mark William Horn, Committee Member

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