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Start Over Year 2008 Keyword Plasma Enhanced Atomic Layer Deposition Author Last Name Sun

1. PECVD, SPATIAL ALD, AND PEALD ZINC OXIDE THIN FILM TRANSISTORS

open_access
Open Access
Author:
Sun, Jie
Title:
PECVD, SPATIAL ALD, AND PEALD ZINC OXIDE THIN FILM TRANSISTORS
Graduate Program:
Electrical Engineering
Keywords:
Plasma Enhanced Atomic Layer Deposition
Atomic Layer Deposition
Plasma Enhanced Chemical Vapor Depostion
Thin Film Transistors (TFTs)
Zinc Oxide (ZnO)
ZnO TFTs Circuits
File:
Download Final0729.pdf
Committee Members:
Thomas Nelson Jackson, Committee Chair/Co-Chair
Jerzy Ruzyllo, Committee Member
Joan Marie Redwing, Committee Member
Mark William Horn, Committee Member