1. Deposition of Pattern Transfer Materials by the Misted Chemical Deposition Process Open Access Author: Mahoney, William John Title: Deposition of Pattern Transfer Materials by the Misted Chemical Deposition Process Graduate Program: Electrical Engineering Keywords: LithographyPhotoresistSpin-OnMisted DepositionPattern Transfer Materials File: Download Mahoney_Thesis_sp2008_final.pdf Committee Members: Jerzy Ruzyllo, Thesis Advisor/Co-Advisor
