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1. MICROMACHINED SWITCHES AND CANTILEVER ACTUATORS BASED ON PIEZOELECTRIC LEAD ZIRCONATE TITANATE (PZT)

open_access
Open Access
Author:
Gross, Steven Joseph
Title:
MICROMACHINED SWITCHES AND CANTILEVER ACTUATORS BASED ON PIEZOELECTRIC LEAD ZIRCONATE TITANATE (PZT)
Graduate Program:
Electrical Engineering
Keywords:
MEMS
PZT
microfabrication
etching
cantilevers
xenon difluoride
ion beam etching
piezoelectric
actuators
unimorph
bimorph
File:
Download SJG-Thesis.pdf
Committee Members:
Thomas Nelson Jackson, Committee Chair/Co-Chair
Srinivas A Tadigadapa, Committee Chair/Co-Chair
Susan E Trolier Mckinstry, Committee Member
Kenji Uchino, Committee Member
Christopher Rahn, Committee Member

2. Thin-film PZT on polymer and glass substrates: breaking the rules

open_access
Open Access
Author:
Liu, Tianning
Title:
Thin-film PZT on polymer and glass substrates: breaking the rules
Graduate Program:
Electrical Engineering
Keywords:
flexible devices
flexible electronics
piezoelectrics
ultrasonic transducers
PZT
PZT thin films
microfabrication
anisotropic conductive film
File:
Download final_dissertation_Tianning_Liu.pdf
Committee Members:
Tom Jackson, Dissertation Advisor/Co-Advisor
Tom Jackson, Committee Chair/Co-Chair
Susan E Trolier-Mckinstry, Committee Chair/Co-Chair
Mehdi Kiani, Committee Member
Christopher D. Rahn, Outside Member
Kultegin Aydin, Program Head/Chair
Susan E Trolier-Mckinstry, Dissertation Advisor/Co-Advisor