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Author:

Yoo, Sang Ha

Title:

Zinc Oxide Thin-Film Transistors for 3D Microelectronic Applications

Graduate Program:

Chemical Engineering (PHD)

Keywords:

PEALD
Zinc Oxide
High Mobility
BEOL Application
ZnO TFT Contacts
FeFET
Modeling
Integrated Circuits
Passivation

File:

Download Dissertation_Sang_Ha_Yoo_Final.pdf

Committee Members:

Enrique Gomez, Chair of Committee
Tom Jackson, Co-Chair & Dissertation Advisor
Seong Kim, Major Field Member
Joan Redwing, Outside Unit & Field Member
Seong Han Kim, Program Head/Chair