1. Evolution of stress and microstructure in Si-doped aluminum gallium nitride thin films Open Access Author: Manning, Ian Title: Evolution of stress and microstructure in Si-doped aluminum gallium nitride thin films Graduate Program: Materials Science and Engineering Keywords: OMVPEwide bandgap semiconductorsdopingstrainstressthin filmsMOCVDAlGaN File: Download Ian_Manning_Dissertation_021611.pdf Committee Members: Joan Marie Redwing, Dissertation Advisor/Co-AdvisorJoan Marie Redwing, Committee Chair/Co-ChairProfessor Christopher Muhlstein, Committee MemberElizabeth C Dickey, Committee MemberDavid Snyder, Committee Member
