1. Monolithic Integration of Two-Dimensional Field Effect Transistors Restricted (Penn State Only) Author: Pendurthi, Rahul Title: Monolithic Integration of Two-Dimensional Field Effect Transistors Graduate Program: Engineering Science and Mechanics Keywords: Monolithic IntegrationM3D Integration2D MaterialsTransition Metal DichalcogenidesTMDsCMOS2D CMOSNanofabricationFETsField Effect TransistorsDevices File: Login to Download Committee Members: Osama Awadelkarim, Major Field MemberMark Horn, Major Field MemberSaptarshi Das, Chair & Dissertation AdvisorJoshua Robinson, Outside Unit & Field MemberAlbert Segall, Program Head/Chair