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Author:

Kozhakhmetov, Azimkhan

Title:

MOCVD Synthesis and Doping of FRONT-END-OF-LINE (FEOL) and BACK-END-OF-LINE (BEOL) Compatible Two-Dimensional WSe2

Graduate Program:

Materials Science and Engineering (PHD)

Keywords:

two-dimensional materials
2D materials
Transition Metal Dichalcogenides
TMDCs
Chemical Vapor Deposition
CVD
Metal Organic Chemical Vapor Deposition
MOCVD
Doping
WSe2
Rhenium doping
Vanadium doping
Front-end-of-line compatible
Back-end-of-line compatible
Re-WSe2
V-WSe2

File:

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Committee Members:

Mauricio Terrones, Outside Unit & Field Member
Saptarshi Das, Outside Field Member
Joan Redwing, Major Field Member
Joshua Robinson, Chair & Dissertation Advisor
John Mauro, Program Head/Chair