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Author:

Hong, Eunki

Title:

Surface Micromachined Peristaltic Pumps Using Lead Zirconate Titanate Film

Graduate Program:

Materials Science and Engineering

Keywords:

surface micromachining
micropump
interdigitated electrode
diaphragm actuator
MEMS
PZT

File:

Download etd.pdf

Committee Members:

Susan E Trolier Mckinstry, Committee Chair/Co-Chair
Clive A Randall, Committee Member
Srinivas A Tadigadapa, Committee Member
S V Krishnaswamy, Committee Member

Author:

Gross, Steven Joseph

Title:

MICROMACHINED SWITCHES AND CANTILEVER ACTUATORS BASED ON PIEZOELECTRIC LEAD ZIRCONATE TITANATE (PZT)

Graduate Program:

Electrical Engineering

Keywords:

MEMS
PZT
microfabrication
etching
cantilevers
xenon difluoride
ion beam etching
piezoelectric
actuators
unimorph
bimorph

File:

Download SJG-Thesis.pdf

Committee Members:

Thomas Nelson Jackson, Committee Chair/Co-Chair
Srinivas A Tadigadapa, Committee Chair/Co-Chair
Susan E Trolier Mckinstry, Committee Member
Kenji Uchino, Committee Member
Christopher Rahn, Committee Member

Author:

Zhang, Zheqian

Title:

DESIGN, FABRICATION AND CHARACTERIZATION OF MICROMACHINED PIEZOELECTRIC T-BEAM TRANSDUCERS

Graduate Program:

Mechanical Engineering

Keywords:

multifunctional transducers
PZT
piezoelectric
MEMS

File:

Download DESIGN_FABRICATION_AND_CHARACTERIZATION_OF_MICROMACHINED_PIEZOELECTRIC_T-BEAM_TRANSDUCERS.pdf

Committee Members:

Christopher Rahn, Thesis Advisor/Co-Advisor
Christopher Rahn, Thesis Advisor/Co-Advisor
Srinivas A Tadigadapa, Thesis Advisor/Co-Advisor
Donghai Wang, Thesis Advisor/Co-Advisor