1. GROWTH OF AMORPHOUS AND EPITAXIAL ALTERNATIVE GATE DIELECTRICS ON SILICON BY MOLECULAR-BEAM EPITAXY AND THEIR CHARACTERIZATION Open Access Author: Edge, Lisa Friedman Title: GROWTH OF AMORPHOUS AND EPITAXIAL ALTERNATIVE GATE DIELECTRICS ON SILICON BY MOLECULAR-BEAM EPITAXY AND THEIR CHARACTERIZATION Graduate Program: Materials Science and Engineering Keywords: high-Kmolecular-beam epitaxyLaAlO3LaScO3Sc2O3La2O3molecular-beam depositionalternative gate dielectrics File: Download Thesis_Lisa_Edge.pdf Committee Members: Darrell G Schlom, Committee Chair/Co-ChairElizabeth C Dickey, Committee MemberVenkatraman Gopalan, Committee MemberThomas Nelson Jackson, Committee Member
