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Author:

Nordlander, Josh

Title:

Magnetron Sputtering of III-N Thin Films

Graduate Program:

Materials Science and Engineering

Keywords:

GaN
III-N
sputter deposition

File:

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Committee Members:

John Mauro, Program Head/Chair
Rongming Chu, Outside Unit & Field Member
Jon-Paul Maria, Chair & Dissertation Advisor
Joan Redwing, Major Field Member
Stephanie Law, Major Field Member