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Author:

Lee, Sora

Title:

TWO-DIMENSIONAL LAYERED CHALCOGENIDE THIN FILM ELECTRONICS FOR FLEXIBLE, BEOL, AND 3D APPLICATIONS

Graduate Program:

Materials Science and Engineering

Keywords:

Back end of line
Flexible electronics
Atomic layer deposition
Two-dimensional materials
Transition metal dichalcogenides
3D fabrication
Metal oxides
High-temperature-capable lift-off

File:

Download Sora_Lee_-_Ph.D._dissertation__final_.pdf

Committee Members:

Tom Jackson, Chair & Dissertation Advisor
Mauricio Terrones, Outside Unit & Field Member
Suzanne Mohney, Major Field Member
Joan Redwing, Major Field Member
John Mauro, Program Head/Chair