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Author:

Zhang, Yuwei

Title:

ReaxFF Studies of Sapphire Surface Properties for Applications in Epitaxy of Thin Films and Semiconductor Manufacturing

Graduate Program:

Materials Science and Engineering

Keywords:

ReaxFF
Molecular dynamics simulations
Sapphire surface
Thin film epitaxy
Atomic layer etching (ALE)
Hydroxylation
Fluorination
Surface chemistry
MoS2/α-Al2O3 interactions
H2O/α-Al2O3 interactions

File:

Download Yuwei_Zhang_PhD_Dissertation_030425.pdf

Committee Members:

John Mauro, Program Head/Chair
Lukas Muechler, Outside Unit & Field Member
Susan Sinnott, Major Field Member
Joan Redwing, Major Field Member
Adri van Duin, Chair & Dissertation Advisor