1. STUDY OF DEFECT STRUCTURE AND ELECTRICAL TRANSPORT IN BACK END OF LINE DIELECTRICS AND SIC MOSFETS Open Access Author: Bittel, Brad Title: STUDY OF DEFECT STRUCTURE AND ELECTRICAL TRANSPORT IN BACK END OF LINE DIELECTRICS AND SIC MOSFETS Graduate Program: Materials Science and Engineering Keywords: magnetic resonanceEPRlow-kBEOLSiC File: Download thesis_after_defense.pdf Committee Members: Patrick M Lenahan, Dissertation Advisor/Co-AdvisorPatrick M Lenahan, Committee Chair/Co-ChairSuman Datta, Committee MemberJoan Marie Redwing, Committee MemberJerzy Ruzyllo, Committee Member
