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Author:

Ozcelik, Adem

Title:

VANADIUM-TRANSITION METAL OXIDE ALLOY THIN FILMS FOR MICROBOLOMETER APPLICATIONS

Graduate Program:

Materials Science and Engineering

Keywords:

ALD
co-sputtering
sputtering
thin films
Vanadium oxide
microbolometer
Atomic Layer Deposition
VTIP
Alloying of vanadium oxide

File:

Download Adem_Ozcelik_MS_MATSE.pdf

Committee Members:

David Lawrence Allara, Thesis Advisor/Co-Advisor
David Lawrence Allara, Thesis Advisor/Co-Advisor

Author:

Sun, Jie

Title:

PECVD, SPATIAL ALD, AND PEALD ZINC OXIDE THIN FILM TRANSISTORS

Graduate Program:

Electrical Engineering

Keywords:

Plasma Enhanced Atomic Layer Deposition
Atomic Layer Deposition
Plasma Enhanced Chemical Vapor Depostion
Thin Film Transistors (TFTs)
Zinc Oxide (ZnO)
ZnO TFTs Circuits

File:

Download Final0729.pdf

Committee Members:

Thomas Nelson Jackson, Committee Chair/Co-Chair
Jerzy Ruzyllo, Committee Member
Joan Marie Redwing, Committee Member
Mark William Horn, Committee Member

Author:

Barth, Michael Judson

Title:

SB-BASED MATERIALS FOR BEYOND SI FIELD EFFECT TRANSISTOR DEVICES

Graduate Program:

Electrical Engineering

Keywords:

InAsSb
GaSb
InGaSb
Soft Error
Heavy Ion
Atomic Layer Deposition

File:

Download Barth_Dissertation_rev6.pdf

Committee Members:

Suman Datta, Dissertation Advisor/Co-Advisor
Jerzy Ruzyllo, Committee Chair/Co-Chair
Sumeet Kumar Gupta, Committee Member
Suman Datta, Committee Member
Roman Engel-Herbert, Outside Member

Author:

Chen, Cindy

Title:

Synthesis and Integration of 2D Materials and ALD Dielectrics

Graduate Program:

Materials Science and Engineering

Keywords:

2D Materials
Atomic Layer Deposition
Chemical Vapor Deposition
Semiconductors
Dielectrics

File:

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Committee Members:

John Mauro, Program Head/Chair
Mauricio Terrones, Outside Unit & Field Member
Suzanne Mohney, Major Field Member
Joshua Robinson, Chair & Dissertation Advisor
Raymond Schaak, Outside Field Member