Search

Author:

Manning, Ian

Title:

Evolution of stress and microstructure in Si-doped aluminum gallium nitride thin films

Graduate Program:

Materials Science and Engineering

Keywords:

OMVPE
wide bandgap semiconductors
doping
strain
stress
thin films
MOCVD
AlGaN

File:

Download Ian_Manning_Dissertation_021611.pdf

Committee Members:

Joan Marie Redwing, Dissertation Advisor/Co-Advisor
Joan Marie Redwing, Committee Chair/Co-Chair
Professor Christopher Muhlstein, Committee Member
Elizabeth C Dickey, Committee Member
David Snyder, Committee Member