1. Nano-structured PECVD Silicon Films and Their Device Applications Open Access Author: Li, Handong Title: Nano-structured PECVD Silicon Films and Their Device Applications Graduate Program: Engineering Science and Mechanics Keywords: poly-crystalline siliconthin film transistornano-crystalline siliconhumidity sensor File: Download etd.pdf Committee Members: Stephen Joseph Fonash, Committee Chair/Co-ChairRussell Messier, Committee MemberJian Xu, Committee MemberMark William Horn, Committee MemberJerzy Ruzyllo, Committee MemberJudith Todd Copley, Committee Member