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Start Over Year 2012 Committee Member Thomas E Mallouk Author Last Name Larrabee

1. A Quantified Dosing ALD Reactor with In-situ Diagnostics for Surface Chemistry Studies

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Open Access
Author:
Larrabee, Thomas James
Title:
A Quantified Dosing ALD Reactor with In-situ Diagnostics for Surface Chemistry Studies
Graduate Program:
Chemistry
Keywords:
atomic layer deposition
quartz crystal microbalance
quadrupole mass spectrometer
in-situ diagnostics
adsorption
reactivity
File:
Download Larrabee_to_upload.pdf
Committee Members:
David Lawrence Allara, Dissertation Advisor/Co-Advisor
Thomas E Mallouk, Dissertation Advisor/Co-Advisor
Miriam Arak Freedman, Committee Member
Roman Engel Herbert, Committee Member