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Start Over Degree PHD Committee Member Thomas E Mallouk Committee Member Roman Engel Herbert Keyword atomic layer deposition

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Author:: Larrabee, Thomas James
Title:: A Quantified Dosing ALD Reactor with In-situ Diagnostics for Surface Chemistry Studies
Graduate Program:: Chemistry
Keywords:: atomic layer deposition
quartz crystal microbalance
quadrupole mass spectrometer
in-situ diagnostics
adsorption
reactivity
File:: Download Larrabee_to_upload.pdf
Committee Members:: David Lawrence Allara, Dissertation Advisor/Co-Advisor
Thomas E Mallouk, Dissertation Advisor/Co-Advisor
Miriam Arak Freedman, Committee Member
Roman Engel Herbert, Committee Member

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