eTD Explore

Start Over Year 2012 Committee Member Thomas E Mallouk Committee Member Miriam Arak Freedman Author Last Name Larrabee

Open Access

Author:: Larrabee, Thomas James
Title:: A Quantified Dosing ALD Reactor with In-situ Diagnostics for Surface Chemistry Studies
Graduate Program:: Chemistry
Keywords:: atomic layer deposition
quartz crystal microbalance
quadrupole mass spectrometer
in-situ diagnostics
adsorption
reactivity
File:: Download Larrabee_to_upload.pdf
Committee Members:: David Lawrence Allara, Dissertation Advisor/Co-Advisor
Thomas E Mallouk, Dissertation Advisor/Co-Advisor
Miriam Arak Freedman, Committee Member
Roman Engel Herbert, Committee Member

Search