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Author:

Hong, Eunki

Title:

Surface Micromachined Peristaltic Pumps Using Lead Zirconate Titanate Film

Graduate Program:

Materials Science and Engineering

Keywords:

surface micromachining
micropump
interdigitated electrode
diaphragm actuator
MEMS
PZT

File:

Download etd.pdf

Committee Members:

Susan E Trolier Mckinstry, Committee Chair/Co-Chair
Clive A Randall, Committee Member
Srinivas A Tadigadapa, Committee Member
S V Krishnaswamy, Committee Member

Author:

Kim, Hyunsoo

Title:

HIGH FREQUENCY LOW VOLTAGE PIEZOELECTRIC MEMS DEVICES WITH CLOSE COUPLED ELECTRONICS

Graduate Program:

Electrical Engineering

Keywords:

MEMS Devices
Ultrasound transducers
Quartz crystal oscillators
Piezoelectric thin film
Piezoelectric micromachined ultrasound transducers

File:

Download dissertation_hsk.pdf

Committee Members:

Thomas Nelson Jackson, Dissertation Advisor/Co-Advisor
Jerzy Ruzyllo, Committee Member
Thomas Nelson Jackson, Committee Chair/Co-Chair
Srinivas A Tadigadapa, Committee Member
Susan E Trolier Mckinstry, Committee Member

Author:

Bassiri Gharb, Nazanin

Title:

Dielectric and piezoelectric nonlinearities in oriented PYbN-PT thin films

Graduate Program:

Materials Science and Engineering

Keywords:

ferroelectric
thin film
nonlinearities
extrinsic contributions
domain walls

File:

Download Thesis-Bassiri-Dec2005.pdf

Committee Members:

Susan E Trolier Mckinstry, Committee Chair/Co-Chair
Clive A Randall, Committee Member
Thomas R Shrout, Committee Member
Srinivas A Tadigadapa, Committee Member
Dragan Damjanovic, Committee Member

Author:

Polcawich, Ronald Gene

Title:

DESIGN, FABRICATION, TEST, AND EVALUATION OF RF MEMS SERIES SWITCHES USING LEAD ZIRCONATE TITANATE (PZT) THIN FILM ACTUATORS

Graduate Program:

Materials Science and Engineering

Keywords:

PZT
RF MEMS
Switch

File:

Download Thesis_PZT_RF_MEMS_Switch_RPolcawich_2007_07_19_final.pdf

Committee Members:

Susan E Trolier Mckinstry, Committee Chair/Co-Chair
Clive A Randall, Committee Member
Srinivas A Tadigadapa, Committee Member
Thomas R Shrout, Committee Member
Madan Dubey, Committee Member

Author:

Gross, Steven Joseph

Title:

MICROMACHINED SWITCHES AND CANTILEVER ACTUATORS BASED ON PIEZOELECTRIC LEAD ZIRCONATE TITANATE (PZT)

Graduate Program:

Electrical Engineering

Keywords:

MEMS
PZT
microfabrication
etching
cantilevers
xenon difluoride
ion beam etching
piezoelectric
actuators
unimorph
bimorph

File:

Download SJG-Thesis.pdf

Committee Members:

Thomas Nelson Jackson, Committee Chair/Co-Chair
Srinivas A Tadigadapa, Committee Chair/Co-Chair
Susan E Trolier Mckinstry, Committee Member
Kenji Uchino, Committee Member
Christopher Rahn, Committee Member