1. EXPLORING NOVEL GLASS MICROFABRICATION TECHNIQUES FOR SENSOR APPLICATIONS Open Access Author: Zhang, Chenchen Title: EXPLORING NOVEL GLASS MICROFABRICATION TECHNIQUES FOR SENSOR APPLICATIONS Graduate Program: Electrical Engineering Keywords: glass etchingon-chip glass microspherical shellWGM resonatorglass microbubble ensulation File: Download Ph.D_thesis_Chenchen_Zhang_Final.pdf Committee Members: Srinivas A Tadigadapa, Dissertation Advisor/Co-AdvisorSrinivas A Tadigadapa, Committee Chair/Co-ChairZhiwen Liu, Committee MemberWeihua Guan, Committee MemberSaptarshi Das, Outside Member