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Author:

Venkatasubramanian, Chandrasekaran

Title:

PREPARATION, CHARACTERIZATION AND POST-DEPOSITION MODIFICATION OF PULSED-DC MAGNETRON SPUTTERED VANADIUM OXIDE THIN FILMS FOR MICROBOLOMETER APPLICATIONS

Graduate Program:

Engineering Science and Mechanics

Keywords:

Pulsed dc sputtering
vanadium oxide
annealing
ion implantation
microbolometer
infrared imaging

File:

Download Venkatasubramanian_Thesis_Final.pdf

Committee Members:

S Ashok, Dissertation Advisor/Co-Advisor
S Ashok, Committee Chair/Co-Chair
Mark William Horn, Committee Chair/Co-Chair
Michael T Lanagan, Committee Member
Thomas Nelson Jackson, Committee Member