1. ATOMIC LAYER DEPOSITION OF HIGH-K DIELECTRICS ON GERMANIUM AND TRANSITION METAL DICHALCOGENIDE Open Access Author: Zheng, Yuanxia Title: ATOMIC LAYER DEPOSITION OF HIGH-K DIELECTRICS ON GERMANIUM AND TRANSITION METAL DICHALCOGENIDE Graduate Program: Physics Keywords: Germaniumatomic layer depositiontransition metal dichalcoginide File: Download Yuanxia_dissertation.pdf Committee Members: Roman Engel-Herbert, Dissertation Advisor/Co-AdvisorNitin Samarth, Committee Chair/Co-ChairMauricio Terrones Maldonado, Committee MemberAdri van Duin, Committee MemberAdri van Duin, Outside Member