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Start Over Graduate Program Materials Science and Engineering Degree PHD Committee Member Joan Marie Redwing Committee Member Patrick M Lenahan Committee Member Suman Datta

1. STUDY OF DEFECT STRUCTURE AND ELECTRICAL TRANSPORT IN BACK END OF LINE DIELECTRICS AND SIC MOSFETS

open_access
Open Access
Author:
Bittel, Brad
Title:
STUDY OF DEFECT STRUCTURE AND ELECTRICAL TRANSPORT IN BACK END OF LINE DIELECTRICS AND SIC MOSFETS
Graduate Program:
Materials Science and Engineering
Keywords:
magnetic resonance
EPR
low-k
BEOL
SiC
File:
Download thesis_after_defense.pdf
Committee Members:
Patrick M Lenahan, Dissertation Advisor/Co-Advisor
Patrick M Lenahan, Committee Chair/Co-Chair
Suman Datta, Committee Member
Joan Marie Redwing, Committee Member
Jerzy Ruzyllo, Committee Member

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