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Start Over Graduate Program Materials Science and Engineering Committee Member Clive A Randall Committee Member Susan E Trolier Mckinstry Keyword dry etching Keyword electroceramics

1. damage-free patterning of ferroelectric lead zirconate titanate thin films for microelectromechanical systems via contact printing

open_access
Open Access
Author:
Welsh, Aaron Joel
Title:
damage-free patterning of ferroelectric lead zirconate titanate thin films for microelectromechanical systems via contact printing
Graduate Program:
Materials Science and Engineering
Keywords:
soft lithography
thin films
dry etching
piezoresponse force microscopy
electroceramics
piezoelectrics
ferroelectrics
File:
Download Aaron_J_Welsh_PhD_Thesis_Final.pdf
Committee Members:
Susan E Trolier Mckinstry, Dissertation Advisor/Co-Advisor
Clive A Randall, Committee Member
Michael T Lanagan, Committee Member
Michael Anthony Hickner, Committee Member

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