1. Performance of PZT Based MEMS Deviceds With Integrated ZnO Electronics Open Access Author: Wallace, Margeaux Louise Title: Performance of PZT Based MEMS Deviceds With Integrated ZnO Electronics Graduate Program: Materials Science and Engineering Keywords: thin filmspiezoelectricsintegrated electronics File: Download Margeaux_Wallace_Completed_Thesis.pdf Committee Members: Susan E Trolier Mckinstry, Dissertation Advisor/Co-AdvisorClive A Randall, Committee MemberJoshua Alexander Robinson, Committee MemberThomas Nelson Jackson, Committee MemberRaegan Johnson Wilke, Special Member
