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Start Over Committee Member Clive A Randall Committee Member Michael Anthony Hickner Committee Member Michael T Lanagan Keyword soft lithography

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Author:: Welsh, Aaron Joel
Title:: damage-free patterning of ferroelectric lead zirconate titanate thin films for microelectromechanical systems via contact printing
Graduate Program:: Materials Science and Engineering
Keywords:: soft lithography
thin films
dry etching
piezoresponse force microscopy
electroceramics
piezoelectrics
ferroelectrics
File:: Download Aaron_J_Welsh_PhD_Thesis_Final.pdf
Committee Members:: Susan E Trolier Mckinstry, Dissertation Advisor/Co-Advisor
Clive A Randall, Committee Member
Michael T Lanagan, Committee Member
Michael Anthony Hickner, Committee Member

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