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Start Over Committee Member Christopher Rahn Committee Member Thomas Nelson Jackson Keyword MEMS Keyword actuators Keyword unimorph Keyword xenon difluoride

1. MICROMACHINED SWITCHES AND CANTILEVER ACTUATORS BASED ON PIEZOELECTRIC LEAD ZIRCONATE TITANATE (PZT)

open_access
Open Access
Author:
Gross, Steven Joseph
Title:
MICROMACHINED SWITCHES AND CANTILEVER ACTUATORS BASED ON PIEZOELECTRIC LEAD ZIRCONATE TITANATE (PZT)
Graduate Program:
Electrical Engineering
Keywords:
MEMS
PZT
microfabrication
etching
cantilevers
xenon difluoride
ion beam etching
piezoelectric
actuators
unimorph
bimorph
File:
Download SJG-Thesis.pdf
Committee Members:
Thomas Nelson Jackson, Committee Chair/Co-Chair
Srinivas A Tadigadapa, Committee Chair/Co-Chair
Susan E Trolier Mckinstry, Committee Member
Kenji Uchino, Committee Member
Christopher Rahn, Committee Member

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