1. Processing of two-dimensional molybdenum disulfdie: oxidation, etching, and deposition on the basal plane for novel nanofabrication processes Open Access Author: Walter, Timothy Noah Title: Processing of two-dimensional molybdenum disulfdie: oxidation, etching, and deposition on the basal plane for novel nanofabrication processes Graduate Program: Materials Science and Engineering Keywords: MoS2contact engineeringoxidationALDnanofabrication File: Download TNW_Dissertation_final.pdf Committee Members: Suzanne E Mohney, Dissertation Advisor/Co-AdvisorSuzanne E Mohney, Committee Chair/Co-ChairAdrianus C Van Duin, Committee MemberSaptarshi Das, Outside MemberThomas Nelson Jackson, Committee MemberJohn C Mauro, Program Head/Chair
