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Author:

Zheng, Yuanxia

Title:

ATOMIC LAYER DEPOSITION OF HIGH-K DIELECTRICS ON GERMANIUM AND TRANSITION METAL DICHALCOGENIDE

Graduate Program:

Physics

Keywords:

Germanium
atomic layer deposition
transition metal dichalcoginide

File:

Download Yuanxia_dissertation.pdf

Committee Members:

Roman Engel-Herbert, Dissertation Advisor/Co-Advisor
Nitin Samarth, Committee Chair/Co-Chair
Mauricio Terrones Maldonado, Committee Member
Adri van Duin, Committee Member
Adri van Duin, Outside Member