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Author:

Welsh, Aaron Joel

Title:

damage-free patterning of ferroelectric lead zirconate titanate thin films for microelectromechanical systems via contact printing

Graduate Program:

Materials Science and Engineering

Keywords:

soft lithography
thin films
dry etching
piezoresponse force microscopy
electroceramics
piezoelectrics
ferroelectrics

File:

Download Aaron_J_Welsh_PhD_Thesis_Final.pdf

Committee Members:

Susan E Trolier Mckinstry, Dissertation Advisor/Co-Advisor
Clive A Randall, Committee Member
Michael T Lanagan, Committee Member
Michael Anthony Hickner, Committee Member