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Start Over Degree PHD Committee Member Judith Todd Copley Keyword nano-crystalline silicon Author Last Name Li Access Level open_access

Open Access

Author:: Li, Handong
Title:: Nano-structured PECVD Silicon Films and Their Device Applications
Graduate Program:: Engineering Science and Mechanics
Keywords:: poly-crystalline silicon
thin film transistor
nano-crystalline silicon
humidity sensor
File:: Download etd.pdf
Committee Members:: Stephen Joseph Fonash, Committee Chair/Co-Chair
Russell Messier, Committee Member
Jian Xu, Committee Member
Mark William Horn, Committee Member
Jerzy Ruzyllo, Committee Member
Judith Todd Copley, Committee Member

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