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Start Over Year 2004 Keyword MEMS

1. Surface Micromachined Peristaltic Pumps Using Lead Zirconate Titanate Film

open_access
Open Access
Author:
Hong, Eunki
Title:
Surface Micromachined Peristaltic Pumps Using Lead Zirconate Titanate Film
Graduate Program:
Materials Science and Engineering
Keywords:
surface micromachining
micropump
interdigitated electrode
diaphragm actuator
MEMS
PZT
File:
Download etd.pdf
Committee Members:
Susan E Trolier Mckinstry, Committee Chair/Co-Chair
Clive A Randall, Committee Member
Srinivas A Tadigadapa, Committee Member
S V Krishnaswamy, Committee Member

2. MICROMACHINED SWITCHES AND CANTILEVER ACTUATORS BASED ON PIEZOELECTRIC LEAD ZIRCONATE TITANATE (PZT)

open_access
Open Access
Author:
Gross, Steven Joseph
Title:
MICROMACHINED SWITCHES AND CANTILEVER ACTUATORS BASED ON PIEZOELECTRIC LEAD ZIRCONATE TITANATE (PZT)
Graduate Program:
Electrical Engineering
Keywords:
MEMS
PZT
microfabrication
etching
cantilevers
xenon difluoride
ion beam etching
piezoelectric
actuators
unimorph
bimorph
File:
Download SJG-Thesis.pdf
Committee Members:
Thomas Nelson Jackson, Committee Chair/Co-Chair
Srinivas A Tadigadapa, Committee Chair/Co-Chair
Susan E Trolier Mckinstry, Committee Member
Kenji Uchino, Committee Member
Christopher Rahn, Committee Member