1. Synthesis and Integration of 2D Materials and ALD Dielectrics Restricted (Penn State Only) Author: Chen, Cindy Title: Synthesis and Integration of 2D Materials and ALD Dielectrics Graduate Program: Materials Science and Engineering (PHD) Keywords: 2D MaterialsAtomic Layer DepositionChemical Vapor DepositionSemiconductorsDielectrics File: Login to Download Committee Members: John Mauro, Program Head/ChairMauricio Terrones, Outside Unit & Field MemberSuzanne Mohney, Major Field MemberJoshua Robinson, Chair & Dissertation AdvisorRaymond Schaak, Outside Field Member